9/23/2011	12:13:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/23/2011	12:13:19 AM	Recipe started at 12:13 AM
9/23/2011	12:13:19 AM	Helium valve closed
9/23/2011	12:13:19 AM	H2 valve closed
9/23/2011	12:13:19 AM	BCl3 valve closed
9/23/2011	12:13:19 AM	PH3 valve closed
9/23/2011	12:13:19 AM	SiCl4 pre valve closed
9/23/2011	12:13:19 AM	SiCl4 post valve closed
9/23/2011	12:13:19 AM	Main Vac valve closed
9/23/2011	12:13:19 AM	Bypass valve closed
9/23/2011	12:13:19 AM	Bubbler valve closed
9/23/2011	12:13:19 AM	Helium MFC set to  0.000000
9/23/2011	12:13:19 AM	H2 MFC set to  0.000000
9/23/2011	12:13:19 AM	BCl3 MFC set to  0.000000
9/23/2011	12:13:19 AM	PHl3 MFC set to  0.000000
9/23/2011	12:13:19 AM	SiCl4 MFC set to  0.000000
9/23/2011	12:13:19 AM	Bypass solenoid MFC set to  0.000000
9/23/2011	12:13:19 AM	Tube furnace set to 0
9/23/2011	12:13:22 AM	H2 valve closed
9/23/2011	12:13:22 AM	BCl3 valve closed
9/23/2011	12:13:22 AM	PH3 valve closed
9/23/2011	12:13:22 AM	SiCl4 pre valve closed
9/23/2011	12:13:22 AM	SiCl4 post valve closed
9/23/2011	12:13:22 AM	Main Vac valve closed
9/23/2011	12:13:22 AM	Bypass valve closed
9/23/2011	12:13:22 AM	Bubbler valve closed
9/23/2011	12:13:22 AM	Helium valve opened
9/23/2011	12:13:22 AM	Helium MFC set to  500.000000
9/23/2011	12:13:22 AM	H2 MFC set to  0.000000
9/23/2011	12:13:22 AM	BCl3 MFC set to  0.000000
9/23/2011	12:13:22 AM	PHl3 MFC set to  0.000000
9/23/2011	12:13:22 AM	SiCl4 MFC set to  0.000000
9/23/2011	12:13:22 AM	Bypass solenoid MFC set to  0.000000
9/23/2011	12:13:23 AM	Tube furnace set to 0
9/23/2011	12:14:26 AM	Helium valve closed
9/23/2011	12:14:26 AM	H2 valve closed
9/23/2011	12:14:26 AM	BCl3 valve closed
9/23/2011	12:14:26 AM	PH3 valve closed
9/23/2011	12:14:26 AM	SiCl4 pre valve closed
9/23/2011	12:14:26 AM	SiCl4 post valve closed
9/23/2011	12:14:26 AM	Main Vac valve closed
9/23/2011	12:14:26 AM	Bypass valve closed
9/23/2011	12:14:26 AM	Bubbler valve closed
9/23/2011	12:14:26 AM	Helium MFC set to  0.000000
9/23/2011	12:14:26 AM	H2 MFC set to  0.000000
9/23/2011	12:14:26 AM	BCl3 MFC set to  0.000000
9/23/2011	12:14:26 AM	PHl3 MFC set to  0.000000
9/23/2011	12:14:26 AM	SiCl4 MFC set to  0.000000
9/23/2011	12:14:26 AM	Bypass solenoid MFC set to  0.000000
9/23/2011	12:14:26 AM	Tube furnace set to 0
9/23/2011	12:14:27 AM	Run finished at 12:14 AM
9/23/2011	12:14:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/23/2011	12:17:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/23/2011	12:17:45 AM	Recipe started at 12:17 AM
9/23/2011	12:17:45 AM	Helium valve closed
9/23/2011	12:17:45 AM	H2 valve closed
9/23/2011	12:17:45 AM	BCl3 valve closed
9/23/2011	12:17:45 AM	PH3 valve closed
9/23/2011	12:17:45 AM	SiCl4 pre valve closed
9/23/2011	12:17:45 AM	SiCl4 post valve closed
9/23/2011	12:17:45 AM	Main Vac valve closed
9/23/2011	12:17:45 AM	Bubbler valve closed
9/23/2011	12:17:45 AM	Bypass valve opened
9/23/2011	12:17:45 AM	Helium MFC set to  0.000000
9/23/2011	12:17:45 AM	H2 MFC set to  0.000000
9/23/2011	12:17:45 AM	BCl3 MFC set to  0.000000
9/23/2011	12:17:45 AM	PHl3 MFC set to  0.000000
9/23/2011	12:17:45 AM	SiCl4 MFC set to  0.000000
9/23/2011	12:17:45 AM	Bypass solenoid MFC set to  0.000000
9/23/2011	12:17:46 AM	Tube furnace set to 0
9/23/2011	12:18:55 AM	Helium valve closed
9/23/2011	12:18:55 AM	H2 valve closed
9/23/2011	12:18:55 AM	BCl3 valve closed
9/23/2011	12:18:55 AM	PH3 valve closed
9/23/2011	12:18:55 AM	SiCl4 pre valve closed
9/23/2011	12:18:55 AM	SiCl4 post valve closed
9/23/2011	12:18:55 AM	Main Vac valve closed
9/23/2011	12:18:55 AM	Bubbler valve closed
9/23/2011	12:18:55 AM	Bypass valve opened
9/23/2011	12:18:55 AM	Helium MFC set to  0.000000
9/23/2011	12:18:55 AM	H2 MFC set to  0.000000
9/23/2011	12:18:55 AM	BCl3 MFC set to  0.000000
9/23/2011	12:18:55 AM	PHl3 MFC set to  0.000000
9/23/2011	12:18:55 AM	SiCl4 MFC set to  0.000000
9/23/2011	12:18:55 AM	Bypass solenoid MFC set to  0.000000
9/23/2011	12:18:55 AM	Tube furnace set to 0
9/23/2011	12:19:55 AM	Helium valve closed
9/23/2011	12:19:55 AM	H2 valve closed
9/23/2011	12:19:55 AM	BCl3 valve closed
9/23/2011	12:19:55 AM	PH3 valve closed
9/23/2011	12:19:55 AM	SiCl4 pre valve closed
9/23/2011	12:19:55 AM	SiCl4 post valve closed
9/23/2011	12:19:55 AM	Bypass valve closed
9/23/2011	12:19:55 AM	Bubbler valve closed
9/23/2011	12:19:55 AM	Main Vac valve opened
9/23/2011	12:19:55 AM	Helium MFC set to  0.000000
9/23/2011	12:19:55 AM	H2 MFC set to  0.000000
9/23/2011	12:19:55 AM	BCl3 MFC set to  0.000000
9/23/2011	12:19:55 AM	PHl3 MFC set to  0.000000
9/23/2011	12:19:55 AM	SiCl4 MFC set to  0.000000
9/23/2011	12:19:55 AM	Bypass solenoid MFC set to  0.000000
9/23/2011	12:19:55 AM	Tube furnace set to 0
9/23/2011	12:19:56 AM	Run finished at 12:19 AM
9/23/2011	12:19:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/23/2011	12:20:33 AM	Tube furnace set to 180
9/23/2011	12:24:13 AM	H2 MFC set to  500.000000
9/23/2011	12:24:20 AM	Main Vac valve closed
9/23/2011	12:24:21 AM	H2 valve opened
9/23/2011	12:24:32 AM	Main Vac valve opened
9/23/2011	12:33:52 AM	H2 valve closed
9/23/2011	12:34:11 AM	H2 valve opened
9/23/2011	6:08:59 AM	Main Vac valve closed
9/23/2011	6:09:10 AM	Main Vac valve opened
9/23/2011	6:09:30 AM	Main Vac valve closed
9/23/2011	6:09:39 AM	Main Vac valve opened
9/23/2011	6:23:21 AM	H2 valve closed
9/23/2011	6:23:25 AM	Main Vac valve closed
9/23/2011	6:23:33 AM	Main Vac valve opened
9/23/2011	6:23:38 AM	H2 valve opened
9/23/2011	6:23:44 AM	Main Vac valve closed
9/23/2011	6:23:50 AM	Main Vac valve opened
9/23/2011	6:23:51 AM	H2 valve closed
9/23/2011	6:25:02 AM	Main Vac valve closed
9/23/2011	6:25:03 AM	H2 valve opened
9/23/2011	6:25:05 AM	Bypass valve opened
9/23/2011	6:27:02 AM	Bypass valve closed
9/23/2011	6:27:02 AM	Main Vac valve opened
9/23/2011	10:23:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/23/2011	10:23:56 AM	Recipe started at 10:23 AM
9/23/2011	10:23:56 AM	Helium valve closed
9/23/2011	10:23:56 AM	H2 valve closed
9/23/2011	10:23:56 AM	BCl3 valve closed
9/23/2011	10:23:56 AM	PH3 valve closed
9/23/2011	10:23:56 AM	SiCl4 pre valve closed
9/23/2011	10:23:56 AM	SiCl4 post valve closed
9/23/2011	10:23:56 AM	Main Vac valve closed
9/23/2011	10:23:56 AM	Bypass valve closed
9/23/2011	10:23:56 AM	Bubbler valve closed
9/23/2011	10:23:56 AM	Helium MFC set to  0.000000
9/23/2011	10:23:56 AM	H2 MFC set to  0.000000
9/23/2011	10:23:56 AM	BCl3 MFC set to  0.000000
9/23/2011	10:23:56 AM	PHl3 MFC set to  0.000000
9/23/2011	10:23:56 AM	SiCl4 MFC set to  0.000000
9/23/2011	10:23:56 AM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:23:56 AM	Tube furnace set to 0
9/23/2011	10:23:57 AM	Run finished at 10:23 AM
9/23/2011	10:23:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/23/2011	10:25:10 AM	H2 valve opened
9/23/2011	10:25:46 AM	H2 valve closed
9/23/2011	10:26:39 AM	H2 MFC set to  500.000000
9/23/2011	10:26:48 AM	H2 valve opened
9/23/2011	10:26:49 AM	Bypass valve opened
9/23/2011	10:50:30 AM	Bypass valve closed
9/23/2011	10:50:30 AM	Main Vac valve opened
9/23/2011	11:17:30 AM	Main Vac valve closed
9/23/2011	11:17:40 AM	Main Vac valve opened
9/23/2011	11:17:59 AM	Main Vac valve closed
9/23/2011	11:18:11 AM	Main Vac valve opened
9/23/2011	11:18:31 AM	H2 valve closed
9/23/2011	11:18:32 AM	Main Vac valve closed
9/23/2011	11:19:13 AM	H2 valve opened
9/23/2011	11:19:16 AM	Bypass valve opened
9/23/2011	11:39:06 AM	Bypass valve closed
9/23/2011	11:39:07 AM	Main Vac valve opened
9/23/2011	1:21:58 PM	Main Vac valve closed
9/23/2011	1:22:17 PM	H2 valve closed
9/23/2011	1:23:00 PM	H2 valve opened
9/23/2011	1:23:01 PM	Bypass valve opened
9/23/2011	2:22:21 PM	Bypass valve closed
9/23/2011	2:22:22 PM	Main Vac valve opened
9/23/2011	2:57:21 PM	Main Vac valve closed
9/23/2011	2:57:33 PM	H2 valve closed
9/23/2011	2:58:00 PM	H2 valve opened
9/23/2011	2:58:02 PM	Bypass valve opened
9/23/2011	3:25:58 PM	Bypass valve closed
9/23/2011	3:25:58 PM	Main Vac valve opened
9/23/2011	3:26:14 PM	H2 valve closed
9/23/2011	3:26:17 PM	H2 MFC set to  0.000000
9/23/2011	3:26:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/23/2011	3:26:44 PM	Recipe started at 3:26 PM
9/23/2011	3:26:44 PM	Helium valve closed
9/23/2011	3:26:44 PM	H2 valve closed
9/23/2011	3:26:44 PM	BCl3 valve closed
9/23/2011	3:26:44 PM	PH3 valve closed
9/23/2011	3:26:44 PM	SiCl4 pre valve closed
9/23/2011	3:26:44 PM	SiCl4 post valve closed
9/23/2011	3:26:44 PM	Main Vac valve closed
9/23/2011	3:26:44 PM	Bypass valve closed
9/23/2011	3:26:44 PM	Bubbler valve closed
9/23/2011	3:26:44 PM	Helium MFC set to  0.000000
9/23/2011	3:26:44 PM	H2 MFC set to  0.000000
9/23/2011	3:26:44 PM	BCl3 MFC set to  0.000000
9/23/2011	3:26:44 PM	PHl3 MFC set to  0.000000
9/23/2011	3:26:44 PM	SiCl4 MFC set to  0.000000
9/23/2011	3:26:44 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	3:26:44 PM	Tube furnace set to 0
9/23/2011	3:26:45 PM	Run finished at 3:26 PM
9/23/2011	3:26:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
9/23/2011	3:32:25 PM	Recipe started at 3:32 PM
9/23/2011	3:32:25 PM	Helium valve closed
9/23/2011	3:32:25 PM	H2 valve closed
9/23/2011	3:32:25 PM	BCl3 valve closed
9/23/2011	3:32:25 PM	PH3 valve closed
9/23/2011	3:32:25 PM	SiCl4 pre valve closed
9/23/2011	3:32:25 PM	SiCl4 post valve closed
9/23/2011	3:32:25 PM	Main Vac valve closed
9/23/2011	3:32:25 PM	Bypass valve closed
9/23/2011	3:32:25 PM	Bubbler valve closed
9/23/2011	3:32:25 PM	Helium MFC set to  0.000000
9/23/2011	3:32:25 PM	H2 MFC set to  0.000000
9/23/2011	3:32:25 PM	BCl3 MFC set to  0.000000
9/23/2011	3:32:25 PM	PHl3 MFC set to  0.000000
9/23/2011	3:32:25 PM	SiCl4 MFC set to  0.000000
9/23/2011	3:32:25 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	3:32:25 PM	Tube furnace set to 0
9/23/2011	3:32:28 PM	H2 valve closed
9/23/2011	3:32:28 PM	BCl3 valve closed
9/23/2011	3:32:28 PM	PH3 valve closed
9/23/2011	3:32:28 PM	SiCl4 pre valve closed
9/23/2011	3:32:28 PM	SiCl4 post valve closed
9/23/2011	3:32:28 PM	Main Vac valve closed
9/23/2011	3:32:28 PM	Bypass valve closed
9/23/2011	3:32:28 PM	Bubbler valve closed
9/23/2011	3:32:28 PM	Helium valve opened
9/23/2011	3:32:28 PM	Helium MFC set to  500.000000
9/23/2011	3:32:28 PM	H2 MFC set to  0.000000
9/23/2011	3:32:28 PM	BCl3 MFC set to  0.000000
9/23/2011	3:32:28 PM	PHl3 MFC set to  0.000000
9/23/2011	3:32:28 PM	SiCl4 MFC set to  0.000000
9/23/2011	3:32:28 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	3:32:28 PM	Tube furnace set to 0
9/23/2011	3:33:36 PM	H2 valve closed
9/23/2011	3:33:36 PM	BCl3 valve closed
9/23/2011	3:33:36 PM	PH3 valve closed
9/23/2011	3:33:36 PM	SiCl4 pre valve closed
9/23/2011	3:33:36 PM	SiCl4 post valve closed
9/23/2011	3:33:36 PM	Main Vac valve closed
9/23/2011	3:33:36 PM	Bypass valve closed
9/23/2011	3:33:36 PM	Helium valve opened
9/23/2011	3:33:36 PM	Bubbler valve opened
9/23/2011	3:33:36 PM	Helium MFC set to  500.000000
9/23/2011	3:33:36 PM	H2 MFC set to  0.000000
9/23/2011	3:33:36 PM	BCl3 MFC set to  0.000000
9/23/2011	3:33:36 PM	PHl3 MFC set to  0.000000
9/23/2011	3:33:36 PM	SiCl4 MFC set to  0.000000
9/23/2011	3:33:36 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	3:33:36 PM	Tube furnace set to 0
9/23/2011	3:34:06 PM	Helium valve closed
9/23/2011	3:34:06 PM	H2 valve closed
9/23/2011	3:34:06 PM	BCl3 valve closed
9/23/2011	3:34:06 PM	PH3 valve closed
9/23/2011	3:34:06 PM	SiCl4 pre valve closed
9/23/2011	3:34:06 PM	SiCl4 post valve closed
9/23/2011	3:34:06 PM	Main Vac valve closed
9/23/2011	3:34:06 PM	Bubbler valve closed
9/23/2011	3:34:06 PM	Bypass valve opened
9/23/2011	3:34:06 PM	Helium MFC set to  0.000000
9/23/2011	3:34:06 PM	H2 MFC set to  0.000000
9/23/2011	3:34:06 PM	BCl3 MFC set to  0.000000
9/23/2011	3:34:06 PM	PHl3 MFC set to  0.000000
9/23/2011	3:34:06 PM	SiCl4 MFC set to  0.000000
9/23/2011	3:34:06 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	3:34:06 PM	Tube furnace set to 0
9/23/2011	3:35:01 PM	Helium valve closed
9/23/2011	3:35:01 PM	H2 valve closed
9/23/2011	3:35:01 PM	BCl3 valve closed
9/23/2011	3:35:01 PM	PH3 valve closed
9/23/2011	3:35:01 PM	SiCl4 pre valve closed
9/23/2011	3:35:01 PM	SiCl4 post valve closed
9/23/2011	3:35:01 PM	Main Vac valve closed
9/23/2011	3:35:01 PM	Bubbler valve closed
9/23/2011	3:35:01 PM	Bypass valve opened
9/23/2011	3:35:01 PM	Helium MFC set to  0.000000
9/23/2011	3:35:01 PM	H2 MFC set to  0.000000
9/23/2011	3:35:01 PM	BCl3 MFC set to  0.000000
9/23/2011	3:35:01 PM	PHl3 MFC set to  0.000000
9/23/2011	3:35:01 PM	SiCl4 MFC set to  0.000000
9/23/2011	3:35:01 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	3:35:01 PM	Tube furnace set to 0
9/23/2011	3:36:01 PM	Helium valve closed
9/23/2011	3:36:01 PM	H2 valve closed
9/23/2011	3:36:01 PM	BCl3 valve closed
9/23/2011	3:36:01 PM	PH3 valve closed
9/23/2011	3:36:01 PM	SiCl4 pre valve closed
9/23/2011	3:36:01 PM	SiCl4 post valve closed
9/23/2011	3:36:01 PM	Bypass valve closed
9/23/2011	3:36:01 PM	Bubbler valve closed
9/23/2011	3:36:01 PM	Main Vac valve opened
9/23/2011	3:36:01 PM	Helium MFC set to  0.000000
9/23/2011	3:36:01 PM	H2 MFC set to  0.000000
9/23/2011	3:36:01 PM	BCl3 MFC set to  0.000000
9/23/2011	3:36:01 PM	PHl3 MFC set to  0.000000
9/23/2011	3:36:01 PM	SiCl4 MFC set to  0.000000
9/23/2011	3:36:01 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	3:36:02 PM	Tube furnace set to 0
9/23/2011	4:16:02 PM	Helium valve closed
9/23/2011	4:16:02 PM	H2 valve closed
9/23/2011	4:16:02 PM	BCl3 valve closed
9/23/2011	4:16:02 PM	PH3 valve closed
9/23/2011	4:16:02 PM	SiCl4 pre valve closed
9/23/2011	4:16:02 PM	SiCl4 post valve closed
9/23/2011	4:16:02 PM	Bypass valve closed
9/23/2011	4:16:02 PM	Bubbler valve closed
9/23/2011	4:16:02 PM	Main Vac valve opened
9/23/2011	4:16:02 PM	Helium MFC set to  0.000000
9/23/2011	4:16:02 PM	H2 MFC set to  0.000000
9/23/2011	4:16:02 PM	BCl3 MFC set to  0.000000
9/23/2011	4:16:02 PM	PHl3 MFC set to  0.000000
9/23/2011	4:16:02 PM	SiCl4 MFC set to  0.000000
9/23/2011	4:16:02 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	4:16:02 PM	Tube furnace set to 1000
9/23/2011	4:56:02 PM	Helium valve closed
9/23/2011	4:56:02 PM	BCl3 valve closed
9/23/2011	4:56:02 PM	PH3 valve closed
9/23/2011	4:56:02 PM	SiCl4 pre valve closed
9/23/2011	4:56:02 PM	SiCl4 post valve closed
9/23/2011	4:56:02 PM	Main Vac valve closed
9/23/2011	4:56:02 PM	Bypass valve closed
9/23/2011	4:56:02 PM	Bubbler valve closed
9/23/2011	4:56:02 PM	H2 valve opened
9/23/2011	4:56:02 PM	Helium MFC set to  0.000000
9/23/2011	4:56:02 PM	H2 MFC set to  500.000000
9/23/2011	4:56:02 PM	BCl3 MFC set to  0.000000
9/23/2011	4:56:02 PM	PHl3 MFC set to  0.000000
9/23/2011	4:56:02 PM	SiCl4 MFC set to  0.000000
9/23/2011	4:56:02 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	4:56:02 PM	Tube furnace set to 1000
9/23/2011	4:56:57 PM	Helium valve closed
9/23/2011	4:56:57 PM	BCl3 valve closed
9/23/2011	4:56:57 PM	PH3 valve closed
9/23/2011	4:56:57 PM	SiCl4 pre valve closed
9/23/2011	4:56:57 PM	SiCl4 post valve closed
9/23/2011	4:56:57 PM	Main Vac valve closed
9/23/2011	4:56:57 PM	Bypass valve closed
9/23/2011	4:56:57 PM	H2 valve opened
9/23/2011	4:56:57 PM	Bubbler valve opened
9/23/2011	4:56:57 PM	Helium MFC set to  0.000000
9/23/2011	4:56:57 PM	H2 MFC set to  500.000000
9/23/2011	4:56:57 PM	BCl3 MFC set to  0.000000
9/23/2011	4:56:57 PM	PHl3 MFC set to  0.000000
9/23/2011	4:56:57 PM	SiCl4 MFC set to  0.000000
9/23/2011	4:56:57 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	4:56:57 PM	Tube furnace set to 1000
9/23/2011	5:16:57 PM	Helium valve closed
9/23/2011	5:16:57 PM	PH3 valve closed
9/23/2011	5:16:57 PM	Main Vac valve closed
9/23/2011	5:16:57 PM	Bypass valve closed
9/23/2011	5:16:57 PM	H2 valve opened
9/23/2011	5:16:57 PM	BCl3 valve opened
9/23/2011	5:16:57 PM	SiCl4 pre valve opened
9/23/2011	5:16:57 PM	SiCl4 post valve opened
9/23/2011	5:16:57 PM	Bubbler valve opened
9/23/2011	5:16:57 PM	Helium MFC set to  0.000000
9/23/2011	5:16:57 PM	H2 MFC set to  500.000000
9/23/2011	5:16:57 PM	BCl3 MFC set to  2.500000
9/23/2011	5:16:57 PM	PHl3 MFC set to  0.000000
9/23/2011	5:16:57 PM	SiCl4 MFC set to  50.000000
9/23/2011	5:16:57 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	5:16:57 PM	Tube furnace set to 1000
9/23/2011	5:26:57 PM	Helium valve closed
9/23/2011	5:26:57 PM	BCl3 valve closed
9/23/2011	5:26:57 PM	PH3 valve closed
9/23/2011	5:26:57 PM	SiCl4 pre valve closed
9/23/2011	5:26:57 PM	SiCl4 post valve closed
9/23/2011	5:26:57 PM	Main Vac valve closed
9/23/2011	5:26:57 PM	Bypass valve closed
9/23/2011	5:26:57 PM	H2 valve opened
9/23/2011	5:26:57 PM	Bubbler valve opened
9/23/2011	5:26:57 PM	Helium MFC set to  0.000000
9/23/2011	5:26:57 PM	H2 MFC set to  500.000000
9/23/2011	5:26:57 PM	BCl3 MFC set to  0.000000
9/23/2011	5:26:57 PM	PHl3 MFC set to  0.000000
9/23/2011	5:26:57 PM	SiCl4 MFC set to  0.000000
9/23/2011	5:26:57 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	5:26:57 PM	Tube furnace set to 0
9/23/2011	5:31:57 PM	H2 valve closed
9/23/2011	5:31:57 PM	BCl3 valve closed
9/23/2011	5:31:57 PM	PH3 valve closed
9/23/2011	5:31:57 PM	SiCl4 pre valve closed
9/23/2011	5:31:57 PM	SiCl4 post valve closed
9/23/2011	5:31:57 PM	Main Vac valve closed
9/23/2011	5:31:57 PM	Bypass valve closed
9/23/2011	5:31:57 PM	Helium valve opened
9/23/2011	5:31:57 PM	Bubbler valve opened
9/23/2011	5:31:57 PM	Helium MFC set to  500.000000
9/23/2011	5:31:57 PM	H2 MFC set to  0.000000
9/23/2011	5:31:57 PM	BCl3 MFC set to  0.000000
9/23/2011	5:31:57 PM	PHl3 MFC set to  0.000000
9/23/2011	5:31:57 PM	SiCl4 MFC set to  0.000000
9/23/2011	5:31:57 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	5:31:58 PM	Tube furnace set to 0
9/23/2011	6:01:57 PM	Helium valve closed
9/23/2011	6:01:57 PM	H2 valve closed
9/23/2011	6:01:57 PM	BCl3 valve closed
9/23/2011	6:01:57 PM	PH3 valve closed
9/23/2011	6:01:57 PM	SiCl4 pre valve closed
9/23/2011	6:01:57 PM	SiCl4 post valve closed
9/23/2011	6:01:57 PM	Main Vac valve closed
9/23/2011	6:01:57 PM	Bypass valve closed
9/23/2011	6:01:57 PM	Bubbler valve closed
9/23/2011	6:01:58 PM	Helium MFC set to  0.000000
9/23/2011	6:01:58 PM	H2 MFC set to  0.000000
9/23/2011	6:01:58 PM	BCl3 MFC set to  0.000000
9/23/2011	6:01:58 PM	PHl3 MFC set to  0.000000
9/23/2011	6:01:58 PM	SiCl4 MFC set to  0.000000
9/23/2011	6:01:58 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	6:01:58 PM	Tube furnace set to 0
9/23/2011	6:31:58 PM	Helium valve closed
9/23/2011	6:31:58 PM	H2 valve closed
9/23/2011	6:31:58 PM	BCl3 valve closed
9/23/2011	6:31:58 PM	PH3 valve closed
9/23/2011	6:31:58 PM	SiCl4 pre valve closed
9/23/2011	6:31:58 PM	SiCl4 post valve closed
9/23/2011	6:31:58 PM	Main Vac valve closed
9/23/2011	6:31:58 PM	Bubbler valve closed
9/23/2011	6:31:58 PM	Bypass valve opened
9/23/2011	6:31:58 PM	Helium MFC set to  0.000000
9/23/2011	6:31:58 PM	H2 MFC set to  0.000000
9/23/2011	6:31:58 PM	BCl3 MFC set to  0.000000
9/23/2011	6:31:58 PM	PHl3 MFC set to  0.000000
9/23/2011	6:31:58 PM	SiCl4 MFC set to  0.000000
9/23/2011	6:31:58 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	6:31:58 PM	Tube furnace set to 0
9/23/2011	6:32:45 PM	Helium valve closed
9/23/2011	6:32:45 PM	H2 valve closed
9/23/2011	6:32:45 PM	BCl3 valve closed
9/23/2011	6:32:45 PM	PH3 valve closed
9/23/2011	6:32:45 PM	SiCl4 pre valve closed
9/23/2011	6:32:45 PM	SiCl4 post valve closed
9/23/2011	6:32:45 PM	Main Vac valve closed
9/23/2011	6:32:45 PM	Bubbler valve closed
9/23/2011	6:32:45 PM	Bypass valve opened
9/23/2011	6:32:45 PM	Helium MFC set to  0.000000
9/23/2011	6:32:45 PM	H2 MFC set to  0.000000
9/23/2011	6:32:45 PM	BCl3 MFC set to  0.000000
9/23/2011	6:32:45 PM	PHl3 MFC set to  0.000000
9/23/2011	6:32:45 PM	SiCl4 MFC set to  0.000000
9/23/2011	6:32:45 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	6:32:45 PM	Tube furnace set to 0
9/23/2011	6:34:45 PM	Helium valve closed
9/23/2011	6:34:45 PM	H2 valve closed
9/23/2011	6:34:45 PM	BCl3 valve closed
9/23/2011	6:34:45 PM	PH3 valve closed
9/23/2011	6:34:45 PM	SiCl4 pre valve closed
9/23/2011	6:34:45 PM	SiCl4 post valve closed
9/23/2011	6:34:45 PM	Bypass valve closed
9/23/2011	6:34:45 PM	Bubbler valve closed
9/23/2011	6:34:45 PM	Main Vac valve opened
9/23/2011	6:34:45 PM	Helium MFC set to  0.000000
9/23/2011	6:34:45 PM	H2 MFC set to  0.000000
9/23/2011	6:34:45 PM	BCl3 MFC set to  0.000000
9/23/2011	6:34:45 PM	PHl3 MFC set to  0.000000
9/23/2011	6:34:45 PM	SiCl4 MFC set to  0.000000
9/23/2011	6:34:45 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	6:34:45 PM	Tube furnace set to 0
9/23/2011	6:34:46 PM	Run finished at 6:34 PM
9/23/2011	6:54:32 PM	Main Vac valve closed
9/23/2011	6:54:51 PM	Main Vac valve opened
9/23/2011	7:05:14 PM	Main Vac valve closed
9/23/2011	7:05:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/23/2011	7:05:40 PM	Recipe started at 7:05 PM
9/23/2011	7:05:40 PM	Helium valve closed
9/23/2011	7:05:40 PM	H2 valve closed
9/23/2011	7:05:40 PM	BCl3 valve closed
9/23/2011	7:05:40 PM	PH3 valve closed
9/23/2011	7:05:40 PM	SiCl4 pre valve closed
9/23/2011	7:05:40 PM	SiCl4 post valve closed
9/23/2011	7:05:40 PM	Main Vac valve closed
9/23/2011	7:05:40 PM	Bypass valve closed
9/23/2011	7:05:40 PM	Bubbler valve closed
9/23/2011	7:05:40 PM	Helium MFC set to  0.000000
9/23/2011	7:05:40 PM	H2 MFC set to  0.000000
9/23/2011	7:05:40 PM	BCl3 MFC set to  0.000000
9/23/2011	7:05:40 PM	PHl3 MFC set to  0.000000
9/23/2011	7:05:40 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:05:40 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:05:40 PM	Tube furnace set to 0
9/23/2011	7:05:43 PM	H2 valve closed
9/23/2011	7:05:43 PM	BCl3 valve closed
9/23/2011	7:05:43 PM	PH3 valve closed
9/23/2011	7:05:43 PM	SiCl4 pre valve closed
9/23/2011	7:05:43 PM	SiCl4 post valve closed
9/23/2011	7:05:43 PM	Main Vac valve closed
9/23/2011	7:05:43 PM	Bypass valve closed
9/23/2011	7:05:43 PM	Bubbler valve closed
9/23/2011	7:05:43 PM	Helium valve opened
9/23/2011	7:05:43 PM	Helium MFC set to  500.000000
9/23/2011	7:05:43 PM	H2 MFC set to  0.000000
9/23/2011	7:05:43 PM	BCl3 MFC set to  0.000000
9/23/2011	7:05:43 PM	PHl3 MFC set to  0.000000
9/23/2011	7:05:43 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:05:43 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:05:43 PM	Tube furnace set to 0
9/23/2011	7:06:45 PM	Helium valve closed
9/23/2011	7:06:45 PM	H2 valve closed
9/23/2011	7:06:45 PM	BCl3 valve closed
9/23/2011	7:06:45 PM	PH3 valve closed
9/23/2011	7:06:45 PM	SiCl4 pre valve closed
9/23/2011	7:06:45 PM	SiCl4 post valve closed
9/23/2011	7:06:45 PM	Main Vac valve closed
9/23/2011	7:06:45 PM	Bypass valve closed
9/23/2011	7:06:45 PM	Bubbler valve closed
9/23/2011	7:06:45 PM	Helium MFC set to  0.000000
9/23/2011	7:06:45 PM	H2 MFC set to  0.000000
9/23/2011	7:06:45 PM	BCl3 MFC set to  0.000000
9/23/2011	7:06:45 PM	PHl3 MFC set to  0.000000
9/23/2011	7:06:45 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:06:45 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:06:45 PM	Tube furnace set to 0
9/23/2011	7:06:46 PM	Run finished at 7:06 PM
9/23/2011	7:06:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/23/2011	7:09:05 PM	Helium MFC set to  500.000000
9/23/2011	7:09:08 PM	Helium valve opened
9/23/2011	7:09:11 PM	Bubbler valve opened
9/23/2011	7:13:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/23/2011	7:14:02 PM	Recipe started at 7:13 PM
9/23/2011	7:14:02 PM	Helium valve closed
9/23/2011	7:14:02 PM	H2 valve closed
9/23/2011	7:14:02 PM	BCl3 valve closed
9/23/2011	7:14:02 PM	PH3 valve closed
9/23/2011	7:14:02 PM	SiCl4 pre valve closed
9/23/2011	7:14:02 PM	SiCl4 post valve closed
9/23/2011	7:14:02 PM	Main Vac valve closed
9/23/2011	7:14:02 PM	Bubbler valve closed
9/23/2011	7:14:02 PM	Bypass valve opened
9/23/2011	7:14:02 PM	Helium MFC set to  0.000000
9/23/2011	7:14:02 PM	H2 MFC set to  0.000000
9/23/2011	7:14:02 PM	BCl3 MFC set to  0.000000
9/23/2011	7:14:02 PM	PHl3 MFC set to  0.000000
9/23/2011	7:14:02 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:14:02 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:14:02 PM	Tube furnace set to 0
9/23/2011	7:14:59 PM	Helium valve closed
9/23/2011	7:14:59 PM	H2 valve closed
9/23/2011	7:14:59 PM	BCl3 valve closed
9/23/2011	7:14:59 PM	PH3 valve closed
9/23/2011	7:14:59 PM	SiCl4 pre valve closed
9/23/2011	7:14:59 PM	SiCl4 post valve closed
9/23/2011	7:14:59 PM	Main Vac valve closed
9/23/2011	7:14:59 PM	Bubbler valve closed
9/23/2011	7:14:59 PM	Bypass valve opened
9/23/2011	7:14:59 PM	Helium MFC set to  0.000000
9/23/2011	7:14:59 PM	H2 MFC set to  0.000000
9/23/2011	7:14:59 PM	BCl3 MFC set to  0.000000
9/23/2011	7:14:59 PM	PHl3 MFC set to  0.000000
9/23/2011	7:14:59 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:14:59 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:14:59 PM	Tube furnace set to 0
9/23/2011	7:15:29 PM	Helium valve closed
9/23/2011	7:15:29 PM	H2 valve closed
9/23/2011	7:15:29 PM	BCl3 valve closed
9/23/2011	7:15:29 PM	PH3 valve closed
9/23/2011	7:15:29 PM	SiCl4 pre valve closed
9/23/2011	7:15:29 PM	SiCl4 post valve closed
9/23/2011	7:15:29 PM	Bypass valve closed
9/23/2011	7:15:29 PM	Bubbler valve closed
9/23/2011	7:15:29 PM	Main Vac valve opened
9/23/2011	7:15:29 PM	Helium MFC set to  0.000000
9/23/2011	7:15:29 PM	H2 MFC set to  0.000000
9/23/2011	7:15:29 PM	BCl3 MFC set to  0.000000
9/23/2011	7:15:29 PM	PHl3 MFC set to  0.000000
9/23/2011	7:15:29 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:15:29 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:15:29 PM	Tube furnace set to 0
9/23/2011	7:15:59 PM	H2 valve closed
9/23/2011	7:15:59 PM	BCl3 valve closed
9/23/2011	7:15:59 PM	PH3 valve closed
9/23/2011	7:15:59 PM	SiCl4 pre valve closed
9/23/2011	7:15:59 PM	SiCl4 post valve closed
9/23/2011	7:15:59 PM	Bypass valve closed
9/23/2011	7:15:59 PM	Bubbler valve closed
9/23/2011	7:15:59 PM	Helium valve opened
9/23/2011	7:15:59 PM	Main Vac valve opened
9/23/2011	7:15:59 PM	Helium MFC set to  20.000000
9/23/2011	7:15:59 PM	H2 MFC set to  0.000000
9/23/2011	7:15:59 PM	BCl3 MFC set to  0.000000
9/23/2011	7:15:59 PM	PHl3 MFC set to  0.000000
9/23/2011	7:15:59 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:15:59 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:15:59 PM	Tube furnace set to 0
9/23/2011	7:16:29 PM	Helium valve closed
9/23/2011	7:16:29 PM	H2 valve closed
9/23/2011	7:16:29 PM	BCl3 valve closed
9/23/2011	7:16:29 PM	PH3 valve closed
9/23/2011	7:16:29 PM	SiCl4 pre valve closed
9/23/2011	7:16:29 PM	SiCl4 post valve closed
9/23/2011	7:16:29 PM	Bypass valve closed
9/23/2011	7:16:29 PM	Bubbler valve closed
9/23/2011	7:16:29 PM	Main Vac valve opened
9/23/2011	7:16:29 PM	Helium MFC set to  0.000000
9/23/2011	7:16:29 PM	H2 MFC set to  0.000000
9/23/2011	7:16:29 PM	BCl3 MFC set to  0.000000
9/23/2011	7:16:29 PM	PHl3 MFC set to  0.000000
9/23/2011	7:16:29 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:16:29 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:16:30 PM	Tube furnace set to 0
9/23/2011	7:17:00 PM	H2 valve closed
9/23/2011	7:17:00 PM	BCl3 valve closed
9/23/2011	7:17:00 PM	PH3 valve closed
9/23/2011	7:17:00 PM	SiCl4 pre valve closed
9/23/2011	7:17:00 PM	SiCl4 post valve closed
9/23/2011	7:17:00 PM	Bypass valve closed
9/23/2011	7:17:00 PM	Bubbler valve closed
9/23/2011	7:17:00 PM	Helium valve opened
9/23/2011	7:17:00 PM	Main Vac valve opened
9/23/2011	7:17:00 PM	Helium MFC set to  20.000000
9/23/2011	7:17:00 PM	H2 MFC set to  0.000000
9/23/2011	7:17:00 PM	BCl3 MFC set to  0.000000
9/23/2011	7:17:00 PM	PHl3 MFC set to  0.000000
9/23/2011	7:17:00 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:17:00 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:17:00 PM	Tube furnace set to 0
9/23/2011	7:17:30 PM	Helium valve closed
9/23/2011	7:17:30 PM	H2 valve closed
9/23/2011	7:17:30 PM	BCl3 valve closed
9/23/2011	7:17:30 PM	PH3 valve closed
9/23/2011	7:17:30 PM	SiCl4 pre valve closed
9/23/2011	7:17:30 PM	SiCl4 post valve closed
9/23/2011	7:17:30 PM	Bypass valve closed
9/23/2011	7:17:30 PM	Bubbler valve closed
9/23/2011	7:17:30 PM	Main Vac valve opened
9/23/2011	7:17:30 PM	Helium MFC set to  0.000000
9/23/2011	7:17:30 PM	H2 MFC set to  0.000000
9/23/2011	7:17:30 PM	BCl3 MFC set to  0.000000
9/23/2011	7:17:30 PM	PHl3 MFC set to  0.000000
9/23/2011	7:17:30 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:17:30 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:17:30 PM	Tube furnace set to 0
9/23/2011	7:18:00 PM	H2 valve closed
9/23/2011	7:18:00 PM	BCl3 valve closed
9/23/2011	7:18:00 PM	PH3 valve closed
9/23/2011	7:18:00 PM	SiCl4 pre valve closed
9/23/2011	7:18:00 PM	SiCl4 post valve closed
9/23/2011	7:18:00 PM	Bypass valve closed
9/23/2011	7:18:00 PM	Bubbler valve closed
9/23/2011	7:18:00 PM	Helium valve opened
9/23/2011	7:18:00 PM	Main Vac valve opened
9/23/2011	7:18:00 PM	Helium MFC set to  20.000000
9/23/2011	7:18:00 PM	H2 MFC set to  0.000000
9/23/2011	7:18:00 PM	BCl3 MFC set to  0.000000
9/23/2011	7:18:00 PM	PHl3 MFC set to  0.000000
9/23/2011	7:18:00 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:18:00 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:18:00 PM	Tube furnace set to 0
9/23/2011	7:18:30 PM	Helium valve closed
9/23/2011	7:18:30 PM	H2 valve closed
9/23/2011	7:18:30 PM	BCl3 valve closed
9/23/2011	7:18:30 PM	PH3 valve closed
9/23/2011	7:18:30 PM	SiCl4 pre valve closed
9/23/2011	7:18:30 PM	SiCl4 post valve closed
9/23/2011	7:18:30 PM	Bypass valve closed
9/23/2011	7:18:30 PM	Bubbler valve closed
9/23/2011	7:18:30 PM	Main Vac valve opened
9/23/2011	7:18:30 PM	Helium MFC set to  0.000000
9/23/2011	7:18:30 PM	H2 MFC set to  0.000000
9/23/2011	7:18:30 PM	BCl3 MFC set to  0.000000
9/23/2011	7:18:30 PM	PHl3 MFC set to  0.000000
9/23/2011	7:18:30 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:18:30 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:18:30 PM	Tube furnace set to 0
9/23/2011	7:18:42 PM	Run aborted at 7:18 PM
9/23/2011	7:18:42 PM	Helium valve closed
9/23/2011	7:18:42 PM	H2 valve closed
9/23/2011	7:18:42 PM	BCl3 valve closed
9/23/2011	7:18:42 PM	PH3 valve closed
9/23/2011	7:18:42 PM	SiCl4 pre valve closed
9/23/2011	7:18:42 PM	SiCl4 post valve closed
9/23/2011	7:18:42 PM	Bypass valve closed
9/23/2011	7:18:42 PM	Main Vac valve closed
9/23/2011	7:18:42 PM	Bubbler valve closed
9/23/2011	7:18:42 PM	Helium MFC set to  0.000000
9/23/2011	7:18:42 PM	H2 MFC set to  0.000000
9/23/2011	7:18:42 PM	BCl3 MFC set to  0.000000
9/23/2011	7:18:42 PM	PHl3 MFC set to  0.000000
9/23/2011	7:18:42 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:18:42 PM	Tube furnace set to 0
9/23/2011	7:18:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/23/2011	7:19:54 PM	Recipe started at 7:19 PM
9/23/2011	7:19:54 PM	Helium valve closed
9/23/2011	7:19:54 PM	H2 valve closed
9/23/2011	7:19:54 PM	BCl3 valve closed
9/23/2011	7:19:54 PM	PH3 valve closed
9/23/2011	7:19:54 PM	SiCl4 pre valve closed
9/23/2011	7:19:54 PM	SiCl4 post valve closed
9/23/2011	7:19:54 PM	Bypass valve closed
9/23/2011	7:19:54 PM	Bubbler valve closed
9/23/2011	7:19:54 PM	Main Vac valve opened
9/23/2011	7:19:54 PM	Helium MFC set to  0.000000
9/23/2011	7:19:54 PM	H2 MFC set to  0.000000
9/23/2011	7:19:54 PM	BCl3 MFC set to  0.000000
9/23/2011	7:19:54 PM	PHl3 MFC set to  0.000000
9/23/2011	7:19:54 PM	SiCl4 MFC set to  0.000000
9/23/2011	7:19:54 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	7:19:54 PM	Tube furnace set to 180
9/23/2011	8:19:54 PM	H2 valve closed
9/23/2011	8:19:54 PM	BCl3 valve closed
9/23/2011	8:19:54 PM	PH3 valve closed
9/23/2011	8:19:54 PM	SiCl4 pre valve closed
9/23/2011	8:19:54 PM	SiCl4 post valve closed
9/23/2011	8:19:54 PM	Bypass valve closed
9/23/2011	8:19:54 PM	Bubbler valve closed
9/23/2011	8:19:54 PM	Helium valve opened
9/23/2011	8:19:54 PM	Main Vac valve opened
9/23/2011	8:19:54 PM	Helium MFC set to  10.000000
9/23/2011	8:19:54 PM	H2 MFC set to  0.000000
9/23/2011	8:19:54 PM	BCl3 MFC set to  0.000000
9/23/2011	8:19:54 PM	PHl3 MFC set to  0.000000
9/23/2011	8:19:54 PM	SiCl4 MFC set to  0.000000
9/23/2011	8:19:54 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	8:19:55 PM	Tube furnace set to 180
9/23/2011	8:20:25 PM	Helium valve closed
9/23/2011	8:20:25 PM	H2 valve closed
9/23/2011	8:20:25 PM	BCl3 valve closed
9/23/2011	8:20:25 PM	PH3 valve closed
9/23/2011	8:20:25 PM	SiCl4 pre valve closed
9/23/2011	8:20:25 PM	SiCl4 post valve closed
9/23/2011	8:20:25 PM	Bypass valve closed
9/23/2011	8:20:25 PM	Bubbler valve closed
9/23/2011	8:20:25 PM	Main Vac valve opened
9/23/2011	8:20:25 PM	Helium MFC set to  0.000000
9/23/2011	8:20:25 PM	H2 MFC set to  0.000000
9/23/2011	8:20:25 PM	BCl3 MFC set to  0.000000
9/23/2011	8:20:25 PM	PHl3 MFC set to  0.000000
9/23/2011	8:20:25 PM	SiCl4 MFC set to  0.000000
9/23/2011	8:20:25 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	8:20:25 PM	Tube furnace set to 180
9/23/2011	8:20:55 PM	H2 valve closed
9/23/2011	8:20:55 PM	BCl3 valve closed
9/23/2011	8:20:55 PM	PH3 valve closed
9/23/2011	8:20:55 PM	SiCl4 pre valve closed
9/23/2011	8:20:55 PM	SiCl4 post valve closed
9/23/2011	8:20:55 PM	Bypass valve closed
9/23/2011	8:20:55 PM	Bubbler valve closed
9/23/2011	8:20:55 PM	Helium valve opened
9/23/2011	8:20:55 PM	Main Vac valve opened
9/23/2011	8:20:55 PM	Helium MFC set to  10.000000
9/23/2011	8:20:55 PM	H2 MFC set to  0.000000
9/23/2011	8:20:55 PM	BCl3 MFC set to  0.000000
9/23/2011	8:20:55 PM	PHl3 MFC set to  0.000000
9/23/2011	8:20:55 PM	SiCl4 MFC set to  0.000000
9/23/2011	8:20:55 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	8:20:55 PM	Tube furnace set to 180
9/23/2011	8:21:25 PM	Helium valve closed
9/23/2011	8:21:25 PM	H2 valve closed
9/23/2011	8:21:25 PM	BCl3 valve closed
9/23/2011	8:21:25 PM	PH3 valve closed
9/23/2011	8:21:25 PM	SiCl4 pre valve closed
9/23/2011	8:21:25 PM	SiCl4 post valve closed
9/23/2011	8:21:25 PM	Bypass valve closed
9/23/2011	8:21:25 PM	Bubbler valve closed
9/23/2011	8:21:25 PM	Main Vac valve opened
9/23/2011	8:21:25 PM	Helium MFC set to  0.000000
9/23/2011	8:21:25 PM	H2 MFC set to  0.000000
9/23/2011	8:21:25 PM	BCl3 MFC set to  0.000000
9/23/2011	8:21:25 PM	PHl3 MFC set to  0.000000
9/23/2011	8:21:25 PM	SiCl4 MFC set to  0.000000
9/23/2011	8:21:25 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	8:21:25 PM	Tube furnace set to 180
9/23/2011	8:23:25 PM	Helium valve closed
9/23/2011	8:23:25 PM	BCl3 valve closed
9/23/2011	8:23:25 PM	PH3 valve closed
9/23/2011	8:23:25 PM	SiCl4 pre valve closed
9/23/2011	8:23:25 PM	SiCl4 post valve closed
9/23/2011	8:23:25 PM	Main Vac valve closed
9/23/2011	8:23:25 PM	Bypass valve closed
9/23/2011	8:23:25 PM	Bubbler valve closed
9/23/2011	8:23:25 PM	H2 valve opened
9/23/2011	8:23:25 PM	Helium MFC set to  0.000000
9/23/2011	8:23:25 PM	H2 MFC set to  500.000000
9/23/2011	8:23:25 PM	BCl3 MFC set to  0.000000
9/23/2011	8:23:25 PM	PHl3 MFC set to  0.000000
9/23/2011	8:23:25 PM	SiCl4 MFC set to  0.000000
9/23/2011	8:23:25 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	8:23:25 PM	Tube furnace set to 1000
9/23/2011	8:24:29 PM	Helium valve closed
9/23/2011	8:24:29 PM	BCl3 valve closed
9/23/2011	8:24:29 PM	PH3 valve closed
9/23/2011	8:24:29 PM	SiCl4 pre valve closed
9/23/2011	8:24:29 PM	SiCl4 post valve closed
9/23/2011	8:24:29 PM	Main Vac valve closed
9/23/2011	8:24:29 PM	Bypass valve closed
9/23/2011	8:24:29 PM	H2 valve opened
9/23/2011	8:24:29 PM	Bubbler valve opened
9/23/2011	8:24:29 PM	Helium MFC set to  0.000000
9/23/2011	8:24:29 PM	H2 MFC set to  500.000000
9/23/2011	8:24:29 PM	BCl3 MFC set to  0.000000
9/23/2011	8:24:29 PM	PHl3 MFC set to  0.000000
9/23/2011	8:24:29 PM	SiCl4 MFC set to  0.000000
9/23/2011	8:24:29 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	8:24:29 PM	Tube furnace set to 1000
9/23/2011	8:24:30 PM	Helium valve closed
9/23/2011	8:24:30 PM	BCl3 valve closed
9/23/2011	8:24:30 PM	PH3 valve closed
9/23/2011	8:24:30 PM	SiCl4 pre valve closed
9/23/2011	8:24:30 PM	SiCl4 post valve closed
9/23/2011	8:24:30 PM	Main Vac valve closed
9/23/2011	8:24:30 PM	Bypass valve closed
9/23/2011	8:24:30 PM	H2 valve opened
9/23/2011	8:24:30 PM	Bubbler valve opened
9/23/2011	8:24:30 PM	Helium MFC set to  0.000000
9/23/2011	8:24:30 PM	H2 MFC set to  500.000000
9/23/2011	8:24:30 PM	BCl3 MFC set to  0.000000
9/23/2011	8:24:30 PM	PHl3 MFC set to  0.000000
9/23/2011	8:24:30 PM	SiCl4 MFC set to  0.000000
9/23/2011	8:24:30 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	8:24:30 PM	Tube furnace set to 1000
9/23/2011	8:44:30 PM	Helium valve closed
9/23/2011	8:44:30 PM	PH3 valve closed
9/23/2011	8:44:30 PM	Main Vac valve closed
9/23/2011	8:44:30 PM	Bypass valve closed
9/23/2011	8:44:30 PM	H2 valve opened
9/23/2011	8:44:30 PM	BCl3 valve opened
9/23/2011	8:44:30 PM	SiCl4 pre valve opened
9/23/2011	8:44:30 PM	SiCl4 post valve opened
9/23/2011	8:44:30 PM	Bubbler valve opened
9/23/2011	8:44:30 PM	Helium MFC set to  0.000000
9/23/2011	8:44:30 PM	H2 MFC set to  500.000000
9/23/2011	8:44:30 PM	BCl3 MFC set to  2.500000
9/23/2011	8:44:30 PM	PHl3 MFC set to  0.000000
9/23/2011	8:44:30 PM	SiCl4 MFC set to  50.000000
9/23/2011	8:44:30 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	8:44:30 PM	Tube furnace set to 1000
9/23/2011	9:00:30 PM	Helium valve closed
9/23/2011	9:00:30 PM	BCl3 valve closed
9/23/2011	9:00:30 PM	PH3 valve closed
9/23/2011	9:00:30 PM	SiCl4 pre valve closed
9/23/2011	9:00:30 PM	SiCl4 post valve closed
9/23/2011	9:00:30 PM	Main Vac valve closed
9/23/2011	9:00:30 PM	Bypass valve closed
9/23/2011	9:00:30 PM	H2 valve opened
9/23/2011	9:00:30 PM	Bubbler valve opened
9/23/2011	9:00:30 PM	Helium MFC set to  0.000000
9/23/2011	9:00:30 PM	H2 MFC set to  500.000000
9/23/2011	9:00:30 PM	BCl3 MFC set to  0.000000
9/23/2011	9:00:30 PM	PHl3 MFC set to  0.000000
9/23/2011	9:00:30 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:00:30 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:00:31 PM	Tube furnace set to 975
9/23/2011	9:02:01 PM	Helium valve closed
9/23/2011	9:02:01 PM	BCl3 valve closed
9/23/2011	9:02:01 PM	PH3 valve closed
9/23/2011	9:02:01 PM	SiCl4 pre valve closed
9/23/2011	9:02:01 PM	SiCl4 post valve closed
9/23/2011	9:02:01 PM	Main Vac valve closed
9/23/2011	9:02:01 PM	Bypass valve closed
9/23/2011	9:02:01 PM	H2 valve opened
9/23/2011	9:02:01 PM	Bubbler valve opened
9/23/2011	9:02:01 PM	Helium MFC set to  0.000000
9/23/2011	9:02:01 PM	H2 MFC set to  500.000000
9/23/2011	9:02:01 PM	BCl3 MFC set to  0.000000
9/23/2011	9:02:01 PM	PHl3 MFC set to  0.000000
9/23/2011	9:02:01 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:02:01 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:02:01 PM	Tube furnace set to 950
9/23/2011	9:03:31 PM	Helium valve closed
9/23/2011	9:03:31 PM	BCl3 valve closed
9/23/2011	9:03:31 PM	PH3 valve closed
9/23/2011	9:03:31 PM	SiCl4 pre valve closed
9/23/2011	9:03:31 PM	SiCl4 post valve closed
9/23/2011	9:03:31 PM	Main Vac valve closed
9/23/2011	9:03:31 PM	Bypass valve closed
9/23/2011	9:03:31 PM	H2 valve opened
9/23/2011	9:03:31 PM	Bubbler valve opened
9/23/2011	9:03:31 PM	Helium MFC set to  0.000000
9/23/2011	9:03:31 PM	H2 MFC set to  500.000000
9/23/2011	9:03:31 PM	BCl3 MFC set to  0.000000
9/23/2011	9:03:31 PM	PHl3 MFC set to  0.000000
9/23/2011	9:03:31 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:03:31 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:03:31 PM	Tube furnace set to 925
9/23/2011	9:05:01 PM	Helium valve closed
9/23/2011	9:05:01 PM	BCl3 valve closed
9/23/2011	9:05:01 PM	PH3 valve closed
9/23/2011	9:05:01 PM	SiCl4 pre valve closed
9/23/2011	9:05:01 PM	SiCl4 post valve closed
9/23/2011	9:05:01 PM	Main Vac valve closed
9/23/2011	9:05:01 PM	Bypass valve closed
9/23/2011	9:05:01 PM	H2 valve opened
9/23/2011	9:05:01 PM	Bubbler valve opened
9/23/2011	9:05:01 PM	Helium MFC set to  0.000000
9/23/2011	9:05:01 PM	H2 MFC set to  500.000000
9/23/2011	9:05:01 PM	BCl3 MFC set to  0.000000
9/23/2011	9:05:01 PM	PHl3 MFC set to  0.000000
9/23/2011	9:05:01 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:05:01 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:05:01 PM	Tube furnace set to 900
9/23/2011	9:06:31 PM	H2 valve closed
9/23/2011	9:06:31 PM	BCl3 valve closed
9/23/2011	9:06:31 PM	PH3 valve closed
9/23/2011	9:06:31 PM	SiCl4 pre valve closed
9/23/2011	9:06:31 PM	SiCl4 post valve closed
9/23/2011	9:06:31 PM	Main Vac valve closed
9/23/2011	9:06:31 PM	Bypass valve closed
9/23/2011	9:06:31 PM	Helium valve opened
9/23/2011	9:06:31 PM	Bubbler valve opened
9/23/2011	9:06:31 PM	Helium MFC set to  500.000000
9/23/2011	9:06:31 PM	H2 MFC set to  0.000000
9/23/2011	9:06:31 PM	BCl3 MFC set to  0.000000
9/23/2011	9:06:31 PM	PHl3 MFC set to  0.000000
9/23/2011	9:06:31 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:06:31 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:06:31 PM	Tube furnace set to 875
9/23/2011	9:08:01 PM	H2 valve closed
9/23/2011	9:08:01 PM	BCl3 valve closed
9/23/2011	9:08:01 PM	PH3 valve closed
9/23/2011	9:08:01 PM	SiCl4 pre valve closed
9/23/2011	9:08:01 PM	SiCl4 post valve closed
9/23/2011	9:08:01 PM	Main Vac valve closed
9/23/2011	9:08:01 PM	Bypass valve closed
9/23/2011	9:08:01 PM	Helium valve opened
9/23/2011	9:08:01 PM	Bubbler valve opened
9/23/2011	9:08:01 PM	Helium MFC set to  500.000000
9/23/2011	9:08:01 PM	H2 MFC set to  0.000000
9/23/2011	9:08:01 PM	BCl3 MFC set to  0.000000
9/23/2011	9:08:01 PM	PHl3 MFC set to  0.000000
9/23/2011	9:08:01 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:08:01 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:08:02 PM	Tube furnace set to 850
9/23/2011	9:09:32 PM	H2 valve closed
9/23/2011	9:09:32 PM	BCl3 valve closed
9/23/2011	9:09:32 PM	PH3 valve closed
9/23/2011	9:09:32 PM	SiCl4 pre valve closed
9/23/2011	9:09:32 PM	SiCl4 post valve closed
9/23/2011	9:09:32 PM	Main Vac valve closed
9/23/2011	9:09:32 PM	Bypass valve closed
9/23/2011	9:09:32 PM	Helium valve opened
9/23/2011	9:09:32 PM	Bubbler valve opened
9/23/2011	9:09:32 PM	Helium MFC set to  500.000000
9/23/2011	9:09:32 PM	H2 MFC set to  0.000000
9/23/2011	9:09:32 PM	BCl3 MFC set to  0.000000
9/23/2011	9:09:32 PM	PHl3 MFC set to  0.000000
9/23/2011	9:09:32 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:09:32 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:09:32 PM	Tube furnace set to 825
9/23/2011	9:11:02 PM	H2 valve closed
9/23/2011	9:11:02 PM	BCl3 valve closed
9/23/2011	9:11:02 PM	PH3 valve closed
9/23/2011	9:11:02 PM	SiCl4 pre valve closed
9/23/2011	9:11:02 PM	SiCl4 post valve closed
9/23/2011	9:11:02 PM	Main Vac valve closed
9/23/2011	9:11:02 PM	Bypass valve closed
9/23/2011	9:11:02 PM	Helium valve opened
9/23/2011	9:11:02 PM	Bubbler valve opened
9/23/2011	9:11:02 PM	Helium MFC set to  500.000000
9/23/2011	9:11:02 PM	H2 MFC set to  0.000000
9/23/2011	9:11:02 PM	BCl3 MFC set to  0.000000
9/23/2011	9:11:02 PM	PHl3 MFC set to  0.000000
9/23/2011	9:11:02 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:11:02 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:11:02 PM	Tube furnace set to 800
9/23/2011	9:12:32 PM	H2 valve closed
9/23/2011	9:12:32 PM	BCl3 valve closed
9/23/2011	9:12:32 PM	PH3 valve closed
9/23/2011	9:12:32 PM	SiCl4 pre valve closed
9/23/2011	9:12:32 PM	SiCl4 post valve closed
9/23/2011	9:12:32 PM	Main Vac valve closed
9/23/2011	9:12:32 PM	Bypass valve closed
9/23/2011	9:12:32 PM	Helium valve opened
9/23/2011	9:12:32 PM	Bubbler valve opened
9/23/2011	9:12:32 PM	Helium MFC set to  500.000000
9/23/2011	9:12:32 PM	H2 MFC set to  0.000000
9/23/2011	9:12:32 PM	BCl3 MFC set to  0.000000
9/23/2011	9:12:32 PM	PHl3 MFC set to  0.000000
9/23/2011	9:12:32 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:12:32 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:12:32 PM	Tube furnace set to 0
9/23/2011	9:27:32 PM	Helium valve closed
9/23/2011	9:27:32 PM	H2 valve closed
9/23/2011	9:27:32 PM	BCl3 valve closed
9/23/2011	9:27:32 PM	PH3 valve closed
9/23/2011	9:27:32 PM	SiCl4 pre valve closed
9/23/2011	9:27:32 PM	SiCl4 post valve closed
9/23/2011	9:27:32 PM	Main Vac valve closed
9/23/2011	9:27:32 PM	Bypass valve closed
9/23/2011	9:27:32 PM	Bubbler valve closed
9/23/2011	9:27:32 PM	Helium MFC set to  0.000000
9/23/2011	9:27:32 PM	H2 MFC set to  0.000000
9/23/2011	9:27:32 PM	BCl3 MFC set to  0.000000
9/23/2011	9:27:32 PM	PHl3 MFC set to  0.000000
9/23/2011	9:27:32 PM	SiCl4 MFC set to  0.000000
9/23/2011	9:27:32 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	9:27:32 PM	Tube furnace set to 0
9/23/2011	10:27:32 PM	H2 valve closed
9/23/2011	10:27:32 PM	BCl3 valve closed
9/23/2011	10:27:32 PM	PH3 valve closed
9/23/2011	10:27:32 PM	SiCl4 pre valve closed
9/23/2011	10:27:32 PM	SiCl4 post valve closed
9/23/2011	10:27:32 PM	Main Vac valve closed
9/23/2011	10:27:32 PM	Bypass valve closed
9/23/2011	10:27:32 PM	Bubbler valve closed
9/23/2011	10:27:32 PM	Helium valve opened
9/23/2011	10:27:32 PM	Helium MFC set to  500.000000
9/23/2011	10:27:32 PM	H2 MFC set to  0.000000
9/23/2011	10:27:32 PM	BCl3 MFC set to  0.000000
9/23/2011	10:27:32 PM	PHl3 MFC set to  0.000000
9/23/2011	10:27:33 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:27:33 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:27:33 PM	Tube furnace set to 0
9/23/2011	10:27:38 PM	H2 valve closed
9/23/2011	10:27:38 PM	BCl3 valve closed
9/23/2011	10:27:38 PM	PH3 valve closed
9/23/2011	10:27:38 PM	SiCl4 pre valve closed
9/23/2011	10:27:38 PM	SiCl4 post valve closed
9/23/2011	10:27:38 PM	Main Vac valve closed
9/23/2011	10:27:38 PM	Bypass valve closed
9/23/2011	10:27:38 PM	Helium valve opened
9/23/2011	10:27:38 PM	Bubbler valve opened
9/23/2011	10:27:38 PM	Helium MFC set to  500.000000
9/23/2011	10:27:38 PM	H2 MFC set to  0.000000
9/23/2011	10:27:38 PM	BCl3 MFC set to  0.000000
9/23/2011	10:27:38 PM	PHl3 MFC set to  0.000000
9/23/2011	10:27:38 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:27:38 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:27:38 PM	Tube furnace set to 0
9/23/2011	10:32:38 PM	Helium valve closed
9/23/2011	10:32:38 PM	H2 valve closed
9/23/2011	10:32:38 PM	BCl3 valve closed
9/23/2011	10:32:38 PM	PH3 valve closed
9/23/2011	10:32:38 PM	SiCl4 pre valve closed
9/23/2011	10:32:38 PM	SiCl4 post valve closed
9/23/2011	10:32:38 PM	Main Vac valve closed
9/23/2011	10:32:38 PM	Bypass valve closed
9/23/2011	10:32:38 PM	Bubbler valve closed
9/23/2011	10:32:38 PM	Helium MFC set to  0.000000
9/23/2011	10:32:38 PM	H2 MFC set to  0.000000
9/23/2011	10:32:38 PM	BCl3 MFC set to  0.000000
9/23/2011	10:32:38 PM	PHl3 MFC set to  0.000000
9/23/2011	10:32:38 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:32:38 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:32:38 PM	Tube furnace set to 0
9/23/2011	10:32:39 PM	Helium valve closed
9/23/2011	10:32:39 PM	H2 valve closed
9/23/2011	10:32:39 PM	BCl3 valve closed
9/23/2011	10:32:39 PM	PH3 valve closed
9/23/2011	10:32:39 PM	SiCl4 pre valve closed
9/23/2011	10:32:39 PM	SiCl4 post valve closed
9/23/2011	10:32:39 PM	Main Vac valve closed
9/23/2011	10:32:39 PM	Bubbler valve closed
9/23/2011	10:32:39 PM	Bypass valve opened
9/23/2011	10:32:39 PM	Helium MFC set to  0.000000
9/23/2011	10:32:39 PM	H2 MFC set to  0.000000
9/23/2011	10:32:39 PM	BCl3 MFC set to  0.000000
9/23/2011	10:32:39 PM	PHl3 MFC set to  0.000000
9/23/2011	10:32:39 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:32:39 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:32:39 PM	Tube furnace set to 0
9/23/2011	10:33:29 PM	Helium valve closed
9/23/2011	10:33:29 PM	H2 valve closed
9/23/2011	10:33:29 PM	BCl3 valve closed
9/23/2011	10:33:29 PM	PH3 valve closed
9/23/2011	10:33:29 PM	SiCl4 pre valve closed
9/23/2011	10:33:29 PM	SiCl4 post valve closed
9/23/2011	10:33:29 PM	Main Vac valve closed
9/23/2011	10:33:29 PM	Bubbler valve closed
9/23/2011	10:33:29 PM	Bypass valve opened
9/23/2011	10:33:29 PM	Helium MFC set to  0.000000
9/23/2011	10:33:29 PM	H2 MFC set to  0.000000
9/23/2011	10:33:29 PM	BCl3 MFC set to  0.000000
9/23/2011	10:33:29 PM	PHl3 MFC set to  0.000000
9/23/2011	10:33:29 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:33:29 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:33:29 PM	Tube furnace set to 0
9/23/2011	10:34:29 PM	Helium valve closed
9/23/2011	10:34:29 PM	H2 valve closed
9/23/2011	10:34:29 PM	BCl3 valve closed
9/23/2011	10:34:29 PM	PH3 valve closed
9/23/2011	10:34:29 PM	SiCl4 pre valve closed
9/23/2011	10:34:29 PM	SiCl4 post valve closed
9/23/2011	10:34:29 PM	Bypass valve closed
9/23/2011	10:34:29 PM	Bubbler valve closed
9/23/2011	10:34:29 PM	Main Vac valve opened
9/23/2011	10:34:29 PM	Helium MFC set to  0.000000
9/23/2011	10:34:29 PM	H2 MFC set to  0.000000
9/23/2011	10:34:29 PM	BCl3 MFC set to  0.000000
9/23/2011	10:34:29 PM	PHl3 MFC set to  0.000000
9/23/2011	10:34:29 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:34:29 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:34:29 PM	Tube furnace set to 0
9/23/2011	10:55:05 PM	Run aborted at 10:55 PM
9/23/2011	10:55:05 PM	Helium valve closed
9/23/2011	10:55:05 PM	H2 valve closed
9/23/2011	10:55:05 PM	BCl3 valve closed
9/23/2011	10:55:05 PM	PH3 valve closed
9/23/2011	10:55:05 PM	SiCl4 pre valve closed
9/23/2011	10:55:05 PM	SiCl4 post valve closed
9/23/2011	10:55:05 PM	Bypass valve closed
9/23/2011	10:55:05 PM	Main Vac valve closed
9/23/2011	10:55:05 PM	Bubbler valve closed
9/23/2011	10:55:05 PM	Helium MFC set to  0.000000
9/23/2011	10:55:05 PM	H2 MFC set to  0.000000
9/23/2011	10:55:05 PM	BCl3 MFC set to  0.000000
9/23/2011	10:55:05 PM	PHl3 MFC set to  0.000000
9/23/2011	10:55:05 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:55:05 PM	Tube furnace set to 0
9/23/2011	10:55:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/23/2011	10:55:15 PM	Recipe started at 10:55 PM
9/23/2011	10:55:15 PM	Helium valve closed
9/23/2011	10:55:15 PM	H2 valve closed
9/23/2011	10:55:15 PM	BCl3 valve closed
9/23/2011	10:55:15 PM	PH3 valve closed
9/23/2011	10:55:15 PM	SiCl4 pre valve closed
9/23/2011	10:55:15 PM	SiCl4 post valve closed
9/23/2011	10:55:15 PM	Main Vac valve closed
9/23/2011	10:55:15 PM	Bypass valve closed
9/23/2011	10:55:15 PM	Bubbler valve closed
9/23/2011	10:55:15 PM	Helium MFC set to  0.000000
9/23/2011	10:55:15 PM	H2 MFC set to  0.000000
9/23/2011	10:55:15 PM	BCl3 MFC set to  0.000000
9/23/2011	10:55:15 PM	PHl3 MFC set to  0.000000
9/23/2011	10:55:15 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:55:15 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:55:15 PM	Tube furnace set to 0
9/23/2011	10:55:18 PM	H2 valve closed
9/23/2011	10:55:18 PM	BCl3 valve closed
9/23/2011	10:55:18 PM	PH3 valve closed
9/23/2011	10:55:18 PM	SiCl4 pre valve closed
9/23/2011	10:55:18 PM	SiCl4 post valve closed
9/23/2011	10:55:18 PM	Main Vac valve closed
9/23/2011	10:55:18 PM	Bypass valve closed
9/23/2011	10:55:18 PM	Bubbler valve closed
9/23/2011	10:55:18 PM	Helium valve opened
9/23/2011	10:55:18 PM	Helium MFC set to  500.000000
9/23/2011	10:55:18 PM	H2 MFC set to  0.000000
9/23/2011	10:55:18 PM	BCl3 MFC set to  0.000000
9/23/2011	10:55:18 PM	PHl3 MFC set to  0.000000
9/23/2011	10:55:18 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:55:18 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:55:18 PM	Tube furnace set to 0
9/23/2011	10:56:21 PM	Helium valve closed
9/23/2011	10:56:21 PM	H2 valve closed
9/23/2011	10:56:21 PM	BCl3 valve closed
9/23/2011	10:56:21 PM	PH3 valve closed
9/23/2011	10:56:21 PM	SiCl4 pre valve closed
9/23/2011	10:56:21 PM	SiCl4 post valve closed
9/23/2011	10:56:21 PM	Main Vac valve closed
9/23/2011	10:56:21 PM	Bypass valve closed
9/23/2011	10:56:21 PM	Bubbler valve closed
9/23/2011	10:56:21 PM	Helium MFC set to  0.000000
9/23/2011	10:56:21 PM	H2 MFC set to  0.000000
9/23/2011	10:56:21 PM	BCl3 MFC set to  0.000000
9/23/2011	10:56:21 PM	PHl3 MFC set to  0.000000
9/23/2011	10:56:21 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:56:21 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:56:21 PM	Tube furnace set to 0
9/23/2011	10:56:22 PM	Run finished at 10:56 PM
9/23/2011	10:56:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/23/2011	10:56:34 PM	Helium MFC set to  500.000000
9/23/2011	10:56:36 PM	Helium valve opened
9/23/2011	10:56:42 PM	Bubbler valve opened
9/23/2011	10:59:14 PM	Bubbler valve closed
9/23/2011	10:59:15 PM	Helium valve closed
9/23/2011	10:59:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/23/2011	10:59:25 PM	Recipe started at 10:59 PM
9/23/2011	10:59:25 PM	Helium valve closed
9/23/2011	10:59:25 PM	H2 valve closed
9/23/2011	10:59:25 PM	BCl3 valve closed
9/23/2011	10:59:25 PM	PH3 valve closed
9/23/2011	10:59:25 PM	SiCl4 pre valve closed
9/23/2011	10:59:25 PM	SiCl4 post valve closed
9/23/2011	10:59:25 PM	Main Vac valve closed
9/23/2011	10:59:25 PM	Bubbler valve closed
9/23/2011	10:59:25 PM	Bypass valve opened
9/23/2011	10:59:25 PM	Helium MFC set to  0.000000
9/23/2011	10:59:25 PM	H2 MFC set to  0.000000
9/23/2011	10:59:25 PM	BCl3 MFC set to  0.000000
9/23/2011	10:59:25 PM	PHl3 MFC set to  0.000000
9/23/2011	10:59:25 PM	SiCl4 MFC set to  0.000000
9/23/2011	10:59:25 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	10:59:25 PM	Tube furnace set to 0
9/23/2011	11:00:21 PM	Helium valve closed
9/23/2011	11:00:21 PM	H2 valve closed
9/23/2011	11:00:21 PM	BCl3 valve closed
9/23/2011	11:00:21 PM	PH3 valve closed
9/23/2011	11:00:21 PM	SiCl4 pre valve closed
9/23/2011	11:00:21 PM	SiCl4 post valve closed
9/23/2011	11:00:21 PM	Main Vac valve closed
9/23/2011	11:00:21 PM	Bubbler valve closed
9/23/2011	11:00:21 PM	Bypass valve opened
9/23/2011	11:00:21 PM	Helium MFC set to  0.000000
9/23/2011	11:00:21 PM	H2 MFC set to  0.000000
9/23/2011	11:00:21 PM	BCl3 MFC set to  0.000000
9/23/2011	11:00:21 PM	PHl3 MFC set to  0.000000
9/23/2011	11:00:21 PM	SiCl4 MFC set to  0.000000
9/23/2011	11:00:21 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	11:00:21 PM	Tube furnace set to 0
9/23/2011	11:01:21 PM	Helium valve closed
9/23/2011	11:01:21 PM	H2 valve closed
9/23/2011	11:01:21 PM	BCl3 valve closed
9/23/2011	11:01:21 PM	PH3 valve closed
9/23/2011	11:01:21 PM	SiCl4 pre valve closed
9/23/2011	11:01:21 PM	SiCl4 post valve closed
9/23/2011	11:01:21 PM	Bypass valve closed
9/23/2011	11:01:21 PM	Bubbler valve closed
9/23/2011	11:01:21 PM	Main Vac valve opened
9/23/2011	11:01:21 PM	Helium MFC set to  0.000000
9/23/2011	11:01:21 PM	H2 MFC set to  0.000000
9/23/2011	11:01:21 PM	BCl3 MFC set to  0.000000
9/23/2011	11:01:21 PM	PHl3 MFC set to  0.000000
9/23/2011	11:01:21 PM	SiCl4 MFC set to  0.000000
9/23/2011	11:01:21 PM	Bypass solenoid MFC set to  0.000000
9/23/2011	11:01:21 PM	Tube furnace set to 0
9/23/2011	11:01:22 PM	Run finished at 11:01 PM
9/23/2011	11:01:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/23/2011	11:01:39 PM	Tube furnace set to 200
9/23/2011	11:03:38 PM	Helium MFC set to  0.000000
9/23/2011	11:03:43 PM	H2 MFC set to  500.000000
9/23/2011	11:03:55 PM	H2 MFC set to  10.000000
9/23/2011	11:03:58 PM	H2 valve opened
9/23/2011	11:04:16 PM	H2 MFC set to  5.000000
9/23/2011	11:04:23 PM	H2 MFC set to  1.000000
9/23/2011	11:05:07 PM	H2 valve closed
9/23/2011	11:05:10 PM	H2 MFC set to  0.000000
9/23/2011	11:05:22 PM	Main Vac valve closed
9/23/2011	11:05:30 PM	H2 MFC set to  500.000000
9/23/2011	11:05:33 PM	H2 valve opened
9/23/2011	11:05:42 PM	Bypass valve opened
9/23/2011	11:08:30 PM	Bypass valve closed
9/23/2011	11:08:31 PM	Main Vac valve opened
